With input from integrated capacitive sensors, Queensgate Instruments’ newest Digital Piezo Translator (DPT) series of actuators deliver precise positioning and rapid settling. The sensors allow the actuators to achieve position resolutions down to 0.09nm (RMS) with less than 2ms response time and 0.5nm (RMS) repeatability. The actuators can move loads of up to 60kg across their entire closed-loop range, which runs from 20µm to 110μm.
The DPT-D with the best in class positioning performance and the more compact DPT-E target applications include interferometry, semiconductor mask-wafer chuck alignment, beam alignment, cavity tuning, adaptive optics, scanning probe microscopy and a variety of different metrology tasks.
For more information about the sensor-enabled DPT-D and DPT-E actuators, click here.