Key applications include: stage feedback, vibration measurement, metrology, deformation measurements, precision manufacturing, drift measurement, precision beam steering and microscopy.
The non-contact position measuring system consists of two sensor plates – a target and a probe that form a parallel plate capacitor. Using the NS2000 controller module, the spacing of these two plates can be determined accurately. Position can be determined to a margin of better than 7pm (picometers), with linearity of 0.02% and a bandwidth from 50 Hz up to 10 KHz.
Round, square or rectangular shapes with active areas of 22.5 mm2, 113 mm2 and 282 mm2 are available.
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