Zygo Corp. is pleased to announce the introduction of the new ZPS absolute position measurement system with ultra-compact optical sensor technology. The ZPS system enables high-precision measurement and positional control for advanced applications, such as deformable optics, lens positioning systems, and fine stage control.
The ZPS system provides high-precision, non-contact absolute position measurements on up to 64 synchronized channels. Key features include a new ultra-compact optical sensor and hardware platform that delivers superior sensitivity, resolution and stability over a range of 1.2 mm. The advanced optical sensor generates virtually no heat and is insensitive to electromagnetic interference, achieving measurement resolution of 0.01 nm with better than 1 nm/day measurement stability.
In addition, the ZPS system utilizes fiber optic cabling that allows for the use of a remote sensor location without impacting the measurement data. Optional accessories enable real-time automatic compensation for changes in ambient environmental conditions.
“The ZPS system represents the next evolution of sensors for short-range position metrology by combining simplified integration, expandability, reliability and performance into a single system,” said Ernesto Abruña, Product Manager for Precision Positioning Systems at ZYGO.
“With these unique capabilities, the ZPS system is a great fit for many nano-positioning applications in which closed-loop control across multiple axes of motion is desired, especially in deformable optical components and complex optical systems.”