The Model 1510 Series of variable capacitive accelerometer from Silicon Designs target vibration measurements in aerospace, automotive, energy, industrial, oil & gas, and test & measurement applications. The MEMS sensors incorporate a micromachined variable capacitive sensing element and a custom integrated circuit. The accelerometer produces two analog voltages which vary proportionately according to measured acceleration levels.
The nitrogen damped and hermetically sealed sensors require two reference voltages, +5.0 and +2.5 volts (nominal), with the output scale factor ratiometric to the +5V 6 mA (typical) reference voltage. The sensitive axis is perpendicular to the bottom of the 20-pin ceramic leadless chip carrier (LCC) package.
For more information about the Model 1510 Series accelerometers, click here.