Digital Controller for High Precision Capacitive Sensing

To simplify the use of its pioneering capacitive sensors and provide precise positional feedback in closed loop applications, Queensgate developed its NPC-D-5200 digital controller. The controller incorporates a precision capacitive measurement circuit that is updated with the stage position 120,000 times per second. This allows it to deliver high positional accuracy at speed. The controller/sensor has the capacity to address a broad spectrum of highly demanding alignment and metrology applications especially in semiconductor manufacturing. Proprietary low noise technology reduces stage position noise in the majority of implementations to just a few tens of pm.

The NPC-D-5200 controller has a compact (268mm x 194mm x 70mm) and lightweight (1.7kg) construction.

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