Using a microelectromechanical system (MEMS) sense die and an Application Specific Integrated Circuit (ASIC) for signal conditioning and interfacing, Honeywell’s Zephyr Digital Airflow Sensors achieve 2.5% accuracy. The fully calibrated and temperature compensated HAF Series are available in standard flow ranges of ±200 SCCM and ±1000 SCCM.
The MEMS design has thermally isolated heater and temperature sensing elements, providing a fast response to air or gas flow. The ASIC provides an I2C digital output to simplify interfacing to microcontrollers. A 3.3 Vdc voltage option, low power requirements and small size make the units well suited for battery-powered and portable applications.
For more information about Honeywell Zephyr™ Digital Airflow Sensors, click here.