For flow rates below 100 ml/min, Sensirion’s SLQ-HC60 flow meter provides a reliable and inexpensive solution for automated systems and other applications. Using its CMOSens Technology that integrates signal conditioning circuitry and microelectromechanical systems (MEMS) structures in a CMOS microchip, Sensirion’s SLQ-HC60 flow meter provides a 0–10V analog output signal from a supply voltage of 24V. With typical repeatability of 1 to 2%, the typical response time is less than 50 ms. The flow channel of the sensor has an inside diameter of 1.8 mm that allows a connection to 1/8” or 3-mm plastic hoses via threaded couplings.

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