Piezoresistive technology is used extensively in MEMS pressure sensors. To extend the pressure range and improve accuracy and stability of pressure sensors for industrial applications, GE Energy’s Measurement & Control Solutions division developed Trench Etched Resonant Pressure (TERPS) technology. Resonant Pressure Transducer (RPT) has been used to fabricate a pressure sensor with a resonator and diaphragm from single crystal silicon for almost 20 years. TERPS technology extends its capability. Recently introduced RPS 8000 and the DPS 8000 resonant silicon pressure sensors increase accuracy and stability greater by a factor of ten over existing piezoresistive pressure sensors. The sensors have a pressure range of up to 700 bar. To physical isolate the MEMS structure from the pressure medium, the sensors use a metallic isolation diaphragm and an oil-filled chamber.
For more information about GE RPS/DPS 8000 High Accuracy Resonant Pressure Sensor, click here.
