Using a microelectromechanical system (MEMS) sense die and an Application Specific Integrated Circuit (ASIC) for signal conditioning and interfacing, Honeywell’s Zephyr Digital Airflow Sensors achieve 2.5% accuracy. The fully calibrated and temperature compensated HAF Series are available in standard flow ranges of ±200 SCCM and ±1000 SCCM. The MEMS design has thermally isolated heater and […]
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