The liquid flow sensor from Swiss sensor manufacturer Sensirion excels thanks to its ultra-pure materials and outstanding precision. The small SLQ-QT500 sensor is designed for the needs of the semiconductor industry: The SLQ-QT500 is perfect for the high purity requirements of the semiconductor industry. It can be used to monitor coating processes with a variety of liquids and enables optimal process safety.
The SLQ-QT500 covers flow rates from 0 – 120ml/min. As with all Sensirion liquid flow sensors, its flow channel is absolutely straight and has no moving parts. The sensor is based on the patented CMOSens Technology. The microthermal flow measurement is performed through the flow channel wall, which separates the chip from the measured liquids. Therefore, only the PFA tubing and the quartz flow channel are in direct contact with the liquid. This guarantees that the sensor has a superb chemical resistance. Thanks to these features as well as the RS485 digital interface, the sensor is able to achieve an exceptionally reliable measurement with a sample rate of up to 1 ms.