Sensing can play a key role in semiconductor batch processing where several wafers with several die per wafer for each batch require a consistent processing environment to achieve the highest yields and the lowest cost. CyberOptics Corporation has two solutions to provide consistency and detect early problems.
The company’s Auto Multi Sensors (AMS/AMSR) can measure leveling, vibration and humidity in one in a single wireless real-time device.With Particle the Airborne Particle Sensor (APS2), customers can detect and identify when and where yield-reducing particles originate and communicate the data wirelessly.
For more information about Auto Multi Sensor Technology, click here and for Airborne Particle Sensor (APS2) technology, click here.