While it is the most popular approach for pressure sensors, microelectromechanical systems (MEMS) technology requires considerable packaging enhancements to address liquid and corrosive gas measurements. In contrast, ceramic pressure sensors can more readily make these types of measurements. In its Ceracore UCS2 pressure sensors, Endress+Hauser uses Al2O3 (99.9 %), a highly resistant ceramic material. This allows the capacative sensors to measure pressures in many aggressive gases and liquids.
The sensor’s cylindrical ceramic components (diaphragm, meter body) are bonded to form a high-strength, hermetically-sealed pressure sensing element. The sensors address gauge pressure measurement of 0.1 to 70 bar and absolute pressure measurements of 0.2 to 70 bar with products ranging from 0 to 100 mbar (10 kPa/1.5 PSI) to 0 to 105 bar (10.5 MPa/ 1575 psi).
For more information about Endress+Hauser Ceracore UCS2 ceramic pressure sensor, click here.